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UV-nanoimprint lithography using a diamond-like carbon stamp

Jeong J.-H.; Kim K.-D.; Sim Y.-S.; Choi D.-G.; Lee E.-S.; Park S.-H.; Lim T.-W.; et al, SPIE(the international society for optical engineering), 31th international symposium, v.6151 II, pp.19 - 24, 2006-01-21

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