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Ultrashort laser ablation of metal thin films without substrate damage

Kim, Seung-Woo; Kim, Byungki; Nam, Han Ku; Watanabe, Shotaro; Park, Sanguk; Kim, Yunseok; KIM, Young-Jin; et al, PRESM2020 - International Symposium on Precision Engineering and Sustainable Manufacturing, Korean Society for Precision Engineering, 2020-11-15

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