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modeling and control of the multi-axis nanopositioner using inertial slider/working method Shim, J.Y.; Jung, H,W,; Gweon, Dae-Gab, Euspen 2nd international conference, pp.558 - 561, 2001-05 |
Nanoslider modeling and waveform adaptation for positioning control Shim, J.Y.; Kim, K.H.; Gweon, Dae-Gab, ASPE 2002 Anual meeting, pp.170 - 175, 2002-10-22 |
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