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Optimal design of a compliant parallel XY nano-positioning stage for high dynamic performance

Lee, Hak Jun; Woo, Siwoong; Kim, Myeong-Hyeon; Gweon, Dae-Gab; Song, Hyeon Jun; Choi, Ei Ho, 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015, pp.257 - 258, euspen, 2015-06

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