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Fabrication of nano-and micro-scale UV imprint stamp using diamond-like carbon coating technology

LEE, ES; JEONG, JH; KIM, KD; PARK, SH; LIM,TW; Yang, Dong-Yol; CHA, NG, 4th Int. Conf. on Nanoimprint and Nanoprint technology, v.6, no.11, pp.3619 - 3623, 4th Int. Conf. on Nanoimprint and Nanoprint technology, 2005

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