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High-Resolution and Low-cost Ag photomask Fabrication by Using Laser Direct Patterning Method

Yang, Min-Yang; Youn, Jin-Ho; Park, Jung-Hwan; Kang, Bong-Chul, ICMTE(International Conference of Manufacturing Technology Engineers) 2012, Seoul, Korea, 한국생산제조시스템학회, 2012-10

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