Search
Results 1-5 of 5 (Search time: 0.005 seconds).
| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.97, pp.335 - 347, 2005-01 | |
| Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.57 - 64, 2004-07 | |
| Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08 | |
| Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.11, pp.3595 - 3601, 2004-07 | |
| Effects of substrate bias on electron energy distribution in magnetron sputtering system Seo, Sang-Hun; In, Jung-Hwan; Chang, Hong-Young; Han, Jeon-Geon, PHYSICS OF PLASMAS, v.11, no.10, pp.4796 - 4800, 2004-10 |
Discover
Type
- 5 Article