Results 21-30 of 147 (Search time: 0.011 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Driving frequency effect on electron heating mode transition in capacitive discharge You, SJ; Ahn, SK; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.477 - 494, 2006-10 | |
Wave-Cutoff Method: Theory, Apparatus, Characteristics, and Applications Na, Byung-Keun; You, Kwang-Ho; Chang, Hong-Young, JAPANESE JOURNAL OF APPLIED PHYSICS, v.50, 2011-08 | |
Study on the mode transitions for rf power dissipation in capacitively coupled plasma You, SJ; Ahn, SK; Chang, Hong-Young, SURFACE & COATINGS TECHNOLOGY, v.193, pp.81 - 87, 2005-04 | |
Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition Ahn, SK; You, SJ; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.928 - 936, 2006-10 | |
Experimental investigations of pulse-power-modulated inductive discharges Seo, SH; Chang, Hong-Young; Yang, WC; Kwon, JH; Kim, DH; Kim, YY; Nam, JH; Moon, SJ, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.48, pp.414 - 421, 2006-03 | |
UV photon assist ionization for low temperature plasma Chae, SH; Seo, SH; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.6, pp.235 - 238, 2006-02 | |
Anomalous evolution of Ar metastable density with electron density in high density Ar discharge Park, Min; Chang, Hong-Young; You, Shin-Jae; Kim, Jung-Hyung; Shin, Yong-Hyeon, PHYSICS OF PLASMAS, v.18, no.10, 2011-10 | |
Power dissipation and mode transition in an RF discharge with multi-hollow cathode electrode Lee, Yun-Seong; Lee, Hun-Su; Chang, Hong-Young, THIN SOLID FILMS, v.518, pp.6682 - 6685, 2010-09 | |
Effective design of multiple hollow cathode electrode to enhance the density of rf capacitively coupled plasma Lee, Hun-Su; Lee, Yun-Seong; Seo, S. H.; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.97, no.8, 2010-08 | |
Proceedings of the international symposium on dry process - DPS 2005 Fujiwara, Nobuo; Stamate, Eugen; Yeom, Geun-Young; Shiratani, Masaharu; Chang, Hong-Young; Economou, Demetre J.; Kusano, Eiji; Chang, Jane P., THIN SOLID FILMS, v.515, no.12, pp.4843 - 4845, 2007-04 |
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