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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Gap length effect on electron energy distribution in capacitive radio frequency discharges You, S. J.; Kim, S. S.; Kim, Jung-Hyung; Seong, Dae-Jin; Shin, Yong-Hyeon; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.91, no.22, 2007-11 |
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