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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Chemical bond structure of a-C:F films with a low dielectric constant deposited from CH4/CF4 gwon-sam kang; ho-jeong; chi-kyu choi; Chang, Choong-Seock, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.42, no.5, pp.676, 2003 |
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