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Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Gehl, Michael; Gibson, Ricky; Hendrickson, Joshua; Homyk, Andrew; Saynatjoki, Antti; Alasaarela, Tapani; Karvonen, Lasse; et al, JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, v.29, no.2, pp.55 - 59, 2012-02

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