DSpace at KOASAS
Browsing DSpace

Browse "PH-Journal Papers(저널논문)" by Author Yun, SM

A to Z

All 0-9

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

or enter first few letters:

Showing results 1 to 11 of 11

1
A study on low dielectric material deposition using a helicon plasma source

Kim, JH; Seo, SH; Yun, SM; Chang, Hong-Young; Lee, KM; Choi, CK, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.143, no.9, pp.2990 - 2995, 1996-09

2
Electrical characteristics of helicon wave plasmas

Yun, SM; Kim, JH; Chang, Hong-Young, IEEE TRANSACTIONS ON PLASMA SCIENCE, v.26, no.2, pp.159 - 166, 1998-04

3
Formation and characterization of the fluorocarbonated-SiO2 films by O-2/FTES-helicon plasma chemical vapor deposition

Oh, KS; Kang, MS; Lee, KM; Kim, DS; Choi, CK; Yun, SM; Chang, Hong-Young; et al, THIN SOLID FILMS, v.345, no.1, pp.45 - 49, 1999-05

4
Frequency dependence of helicon wave plasmas near lower hybrid resonance frequency

Yun, SM; Kim, JH; Chang, Hong-Young, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.15, no.3, pp.673 - 677, 1997

5
Low dielectric constant CF/SiOF composite film deposition in a helicon plasma reactor

Yun, SM; Chang, Hong-Young; Kang, MS; Choi, CK, THIN SOLID FILMS, v.341, no.1-2, pp.109 - 111, 1999-03

6
Low-dielectric-constant-film deposition with various gases in a helicon plasma reactor

Yun, SM; Chang, Hong-Young; Oh, KS; Choi, CK, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.38, no.7B, pp.4531 - 4534, 1999-07

7
m=+/-1 and m=+/-2 mode helicon wave excitation

Kim, JH; Yun, SM; Chang, Hong-Young, IEEE TRANSACTIONS ON PLASMA SCIENCE, v.24, no.6, pp.1364 - 1370, 1996-12

8
M=+1 mode helicon wave excitation using solenoid antenna

Kim, JH; Yun, SM; Chang, Hong-Young, PHYSICS LETTERS A, v.221, no.1-2, pp.94 - 98, 1996-09

9
Radial density profile change near lower hybrid frequency in M=0 helicon wave plasmas

Yun, SM; Chang, Hong-Young, PHYSICS LETTERS A, v.248, no.5-6, pp.400 - 404, 1998-11

10
SiOF film deposition using FSi(OC2H5)(3) gas in a helicon plasma source

Yun, SM; Chang, Hong-Young; Lee, KM; Kim, DC; Choi, CK, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.145, no.7, pp.2576 - 2580, 1998-07

11
The deposition of SiOF film with low dielectric constant in a helicon plasma source

Kim, JH; See, SH; Yun, SM; Chang, Hong-Young; Lee, KM; Choi, CK, APPLIED PHYSICS LETTERS, v.68, no.11, pp.1507 - 1509, 1996-03

Discover

Type

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0