Browse "PH-Journal Papers(저널논문)" by Author Wook, Chung Chin

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On the plasma uniformity of multi-electrode CCPs for large-area processing

Jung, Park Gi; Hoon, Seo Sang; Wook, Chung Chin; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.22, no.5, 2013-10

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