Browse "PH-Journal Papers(저널논문)" by Subject plasma source

Showing results 1 to 3 of 3

1
Characteristics of the Plasma Source for Ground Ionosphere Simulation Surveyed by Disk-Type Langmuir Probe

Ryu, Kwangsun; Lee, Jun Chan; Kim, Son-Goo; Chung, Tae Jin; SHIN, Goo-Hwan; Cha, Wonho; Min, Kyoungwook; et al, JOURNAL OF ASTRONOMY AND SPACE SCIENCES, v.34, no.4, pp.343 - 351, 2017-12

2
Characterization of a high-frequency inductively coupled plasma source

Lee, DS; Jun, HS; Chang, Hong-Young, THIN SOLID FILMS, v.506, pp.469 - 473, 2006-05

3
Development of a dual inductively coupled plasma source for direct and remote plasma generation in a reactor

Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS REVIEW PAPERS, v.44, no.2, pp.1081 - 1085, 2005-02

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