Browse "PH-Journal Papers(저널논문)" by Subject TEMPERATURE CONTROL
Showing results 1 to 2 of 2
| On a dual inductively coupled plasma for direct and remote plasma in a reactor Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, PHYSICS OF PLASMAS, v.11, pp.4830 - 4836, 2004-10 |
| Plasma parameters analysis of various mixed gas inductively coupled plasmas Bai, KH; You, SJ; Chang, Hong-Young; Uhm, HS, PHYSICS OF PLASMAS, v.9, no.6, pp.2831 - 2838, 2002-06 |
Discover
Type
- 5,718 Article
Open Access
- 510 OA Article
Date issued
- 808 2020 - 2024
- 1,979 2010 - 2019
- 1,595 2000 - 2009
- 975 1990 - 1999
- 340 1980 - 1989