Browse "PH-Journal Papers(저널논문)" by Subject Multi-hole electrode
Showing results 1 to 2 of 2
| The characteristics of the multi-hole RF capacitively coupled plasma discharged with neon, argon and krypton Lee, H. S.; Lee, Yun-Seong; Seo, S. H.; Chang, Hong-Young, THIN SOLID FILMS, v.519, pp.6955 - 6959, 2011-08 |
| The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma Lee, HunSu; Kim, EunAe; Lee, YunSeong; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.289 - 292, 2013-11 |
Discover
Type
- 5,714 Article
Open Access
- 510 OA Article
Date issued
- 806 2020 - 2024
- 1,977 2010 - 2019
- 1,595 2000 - 2009
- 975 1990 - 1999
- 340 1980 - 1989