Browse "PH-Journal Papers(저널논문)" by Subject LOW-TEMPERATURE

Showing results 1 to 2 of 2

1
Capacitive Electron Cooling in an Inductively Coupled Plasma Source/Capacitively Coupled Plasma Bias Reactor

Jun, Hyun-Su; Lee, Dong-Seok; Chang, Hong-Young, JAPANESE JOURNAL OF APPLIED PHYSICS, v.52, no.10, 2013-10

2
The characteristics of the multi-hole RF capacitively coupled plasma discharged with neon, argon and krypton

Lee, H. S.; Lee, Yun-Seong; Seo, S. H.; Chang, Hong-Young, THIN SOLID FILMS, v.519, pp.6955 - 6959, 2011-08

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