Browse "PH-Journal Papers(저널논문)" by Subject ELECTRON-TEMPERATURE CONTROL
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| Control and analysis of ion species in inductively coupled nitration plasma using a grid system Bai, KH; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.87, pp.299 - 308, 2005-09 |
| Control of ion species in inductively coupled oxidation plasma by inert gas mixing Bai, KH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.100, pp.443 - 448, 2006-12 |
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