Browse "PH-Journal Papers(저널논문)" by Subject EEDF
Showing results 1 to 3 of 3
| A simple analysis on the abnormal behavior of the argon metastable density in an inductively coupled Ar plasma Park, Min; Chang, Hong-Young; You, Shin-Jae; Kim, Jung-Hyung; Seong, Dae-Jin; Shin, Yong-Hyeon, THIN SOLID FILMS, v.518, pp.6694 - 6699, 2010-09 |
| Experimental investigations of pulse-power-modulated inductive discharges Seo, SH; Chang, Hong-Young; Yang, WC; Kwon, JH; Kim, DH; Kim, YY; Nam, JH; et al, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.48, pp.414 - 421, 2006-03 |
| Review of heating mechanism in inductively coupled plasma Seo, SH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09 |
Discover
Type
- 5,718 Article
Open Access
- 510 OA Article
Date issued
- 808 2020 - 2024
- 1,979 2010 - 2019
- 1,595 2000 - 2009
- 975 1990 - 1999
- 340 1980 - 1989