Browse "PH-Journal Papers(저널논문)" by Author Seong, Dae-Jin
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| A simple analysis on the abnormal behavior of the argon metastable density in an inductively coupled Ar plasma Park, Min; Chang, Hong-Young; You, Shin-Jae; Kim, Jung-Hyung; Seong, Dae-Jin; Shin, Yong-Hyeon, THIN SOLID FILMS, v.518, pp.6694 - 6699, 2010-09 |
| Gap length effect on electron energy distribution in capacitive radio frequency discharges You, S. J.; Kim, S. S.; Kim, Jung-Hyung; Seong, Dae-Jin; Shin, Yong-Hyeon; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.91, no.22, 2007-11 |
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