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Chemically etched ultrahigh-Q wedge-resonator on a silicon chip

Lee, Hansuek; Chen, Tong; Li, Jiang; Yang, Ki Youl; Jeon, Seokmin; Painter, Oskar; Vahala, Kerry J., NATURE PHOTONICS, v.6, no.6, pp.369 - 373, 2012-06

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