Browse "PH-Journal Papers(저널논문)" by Author HOBSON, WS

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MICROSCOPIC AND MACROSCOPIC UNIFORMITY CONTROL IN PLASMA-ETCHING

GIAPIS, KP; SCHELLER, GR; GOTTSCHO, RA; HOBSON, WS; Lee, Yong-Hee, APPLIED PHYSICS LETTERS, v.57, no.10, pp.983 - 985, 1990-09

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