Showing results 1 to 1 of 1
Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature Song, Hohyun; Seo, Sang Hun; Chang, Hongyoung, CURRENT APPLIED PHYSICS, v.18, no.11, pp.1436 - 1440, 2018-11 |
Discover