Browse "PH-Journal Papers(저널논문)" by Author In, JH

Showing results 7 to 10 of 10

7
Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge

Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08

8
Paradoxical sheath width variation in transversely magnetized capacitive coupled plasma

You, SJ; Bai, KH; In, JH; Chang, Hong-Young; Choi, CK, SURFACE & COATINGS TECHNOLOGY, v.171, pp.226 - 230, 2003-07

9
Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma

Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.14, pp.576 - 580, 2005-08

10
Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Seo, SH; In, JH; Chang, Hong-Young; Han, JG, JOURNAL OF APPLIED PHYSICS, v.98, pp.8471 - 8477, 2005-08

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