Showing results 7 to 10 of 10
Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08 |
Paradoxical sheath width variation in transversely magnetized capacitive coupled plasma You, SJ; Bai, KH; In, JH; Chang, Hong-Young; Choi, CK, SURFACE & COATINGS TECHNOLOGY, v.171, pp.226 - 230, 2003-07 |
Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.14, pp.576 - 580, 2005-08 |
Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge Seo, SH; In, JH; Chang, Hong-Young; Han, JG, JOURNAL OF APPLIED PHYSICS, v.98, pp.8471 - 8477, 2005-08 |
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