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Control of electron density and temperature with a modified capacitive discharge You, SJ; Bai, KH; Chae, SH; Chang, Hong-Young, PLASMA CHEMISTRY AND PLASMA PROCESSING, v.25, pp.245 - 254, 2005-06 |
UV photon assist ionization for low temperature plasma Chae, SH; Seo, SH; Chang, Hong-Young, CURRENT APPLIED PHYSICS, v.6, pp.235 - 238, 2006-02 |
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