Browse "PH-Conference Papers(학술회의논문)" by Author Lee, KM
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| The deposition of SiOF film with low dielectric constant in a helicon plasma source Kim, JH; Seo, SH; Yun, SM; Lee, KM; Choi, CK; Chang, Hong-Young, 3rd Asia-Pacific Conference on Plasma Science & Technology, Plasma Science & Technology, 1996 |
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