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EEDF measurements in dual frequency capacitively coupled plasma(CCP). Jeon, B; Shon, J; Chang, Hong-Young, The 30th IEEE International Conference on Plasma Science , IEEE, 2003-06 |
Plasma Characterization of 2, 27 MHz Dual Frequency Capacitively Coupled Plasma(CCP) Chang, Hong-Young; Jeon, B, 6th APCPST, APCPST, 2002-07 |
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