Browse "PH-Conference Papers(학술회의논문)" by Author Jeon, B

Showing results 1 to 2 of 2

1
EEDF measurements in dual frequency capacitively coupled plasma(CCP).

Jeon, B; Shon, J; Chang, Hong-Young, The 30th IEEE International Conference on Plasma Science , IEEE, 2003-06

2
Plasma Characterization of 2, 27 MHz Dual Frequency Capacitively Coupled Plasma(CCP)

Chang, Hong-Young; Jeon, B, 6th APCPST, APCPST, 2002-07

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