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Control of electron temperature using grid bias voltage and its application to etching using fluorocarbon gases. Bai, KH; Hong, JI; You, SJ; Chang, Hong-Young, ESFC-13, ESFC, 2001 |
Electron Temperature control in ICP using grid and its use for control the ion ratio in CF4 / Ar plasma Bai, KH; Hong, JI; Kim, SS; Chang, Hong-Young, 53rd Annual Gaseous Electronic Conference, APS Physics, 2000 |
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