Browse "PH-Conference Papers(학술회의논문)" by Author Kim, S.S.
Showing results 3 to 3 of 3
| Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges Kim, S.S.; Chung, C.W.; Chang, Hong-Young, The Joint International Plasma Symposium, v.435, no.40545, pp.72 - 77, Thin Solid Films, 2002-07-01 |
Discover
Type
- 2 Article
- 4,334 Conference
Date issued
- 306 2020 - 2024
- 1,344 2010 - 2019
- 1,118 2000 - 2009
- 1,179 1990 - 1999
- 327 1980 - 1989