Formation of shallow phosphorus layers by rapid thermal processing using a solid diffusion source
- Publisher
- 대한전기학회
- Issue Date
- 1988-09
- Language
- English
- Citation
JOURNAL OF THE KOREA INSTITUTE OF ELECTRONIC ENGINEERS, v.1, no.2, pp.105 - 109
- ISSN
- 1013-0780
- Appears in Collection
- EE-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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