Browse "CH-Journal Papers(저널논문)" by Author Lee, KK

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Environmentally friendly negative resists based on acid-catalyzed acetalization for 193-nm lithography

Kim, Jin-Baek; Jang, JH; Ko, JS; Choi, JH; Lee, KK, MACROMOLECULAR RAPID COMMUNICATIONS, v.24, no.15, pp.879 - 882, 2003-10

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