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Ultrahigh density sub-10 nm TiO2 nanosheet arrays with high aspect ratios via the spacer-defined double-patterning process

Bak, Chang Hong; Ku, Se-Jin; Jo, Gyeongcheon; Jung, Kyoung Ok; Lee, Ha Jin; Kwon, Se Hun; Kim, Jin-Baek, POLYMER, v.60, pp.267 - 273, 2015-03

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