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ENHANCED PLASMA ETCH RESISTANCE OF ACRYLIC ACID-CALCIUM ACETATE MODIFIED POLY(METHYLMETHACRYLATE)

CHOI, JO; Kim, Sang Youl; MOORE, JA; CORELLI, JC; STECKL, AJ, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.5, no.1, pp.382 - 385, 1987

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