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Showing results 1 to 4 of 4

1
Fabrication of Sub-10 nm TiO2 Nanosheet Arrays via the Spacer-Defined Double-Patterning Process

Bak, Chang-Hong; Ku, Se Jin; Jo, Gyeong Cheon; Jung, Kyoung Ok; Kim, Jin-Baek, 2014 춘계 한국고분자학회, 대한 고분자 학회, 2014-04-11

2
Fabrication of versatile nanoporous templates with high aspect ratios by incorporation of Si-containing block copolymers into the lithographic bilayer system

Kim, Su Min; Ku, Se Jin; Jo, Gyeong Cheon; Bak, Chang Hong; Kim, Jin-Baek, Frontiers in Polymer Science 2013, Elsevier, 2013-05-21

3
High resolution nonchemically amplified resists (Non-CARs) for extreme ultraviolet

Woo, Seung A; Choi, Soo-Young; Ku, Se Jin; Kim, Jin-Baek, 2012 Advanced lithography, SPIE Advanced Lithography, 2012-02-14

4
Ultrahigh Density Sub-10 nm TiO2 Nanosheet Arrays Using Si-Containing Block Copolymer Lithography and Atomic Layer Deposition

Bak, Chang-Hong; Ku, Se Jin; Jo, Gyeong Cheon; Choi, Soo Young; Ha, Jae Wook; Kim, Jin-Baek, E-MRS 2014 SPRING MEETING , European Materials Research Society (E-MRS), 2014-05-26

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