Browse "CH-Conference Papers(학술회의논문)" by Author Kim, Kyoung-Seon

Showing results 1 to 7 of 7

1
Bilayer Resists Based on Polyhedral Oligomeric Silsesquioxane for 193-nm Lithography

Ganesan, Ramakrishnan; Choi, Jae-Hak; Kim, Kyoung-Seon; Oh, Tae-Hwan; Yun, Hyo-Jin; Kwon, Young-Gil; Kim, Jin-Baek, SPIE-The International Society for Optical Engineering, pp.0, SPIE, 2005-02-27

2
Photobleaching Deep UV Resists Based on Single Component Nonchemically Amplified Resist System

Kim, Kyoung-Seon; Park, Ji Young; Kim, Sumin; Kim, Jin-Baek, SPIE-The International Society for Optical Engineering, 2006-02-12

3
Synthesis of copolymers containing diazoketo groups and their application as DUV resists

Kim, Jin-Baek; Kim, Kyoung-Seon, Advances in Resist Technology and Processing XXII, v.5753, pp.1057 - 1065, 2005-02-28

4
Synthesis of copolymers containing diazoketo groups and their application as DUV resists

Kim, Jin-Baek; Kim, Kyoung-Seon, Progr. Biomed. Opt. Imaging Proc. SPIE, v.5753, pp.1057 - 1065, SPIE, 2005

5
Synthesis of norbornene copolymers with diazo groups and their application as DUV resists

Kim, Jin-Baek; Kim, Kyoung-Seon, Advances in Resist Technology and Processing XX, pp.655 - 664, 2003-02-24

6
Synthesis of Norbornene Copolymers with Diazo Groups AND their Application as Resist

Kim, Jin-Baek; Kim, Kyoung-Seon, 한국고분자학회 2001년도 추계학술대회, pp.155 - 155, 한국고분자학회, 2001-10-01

7
Synthesis of photobleachable deep UV resists based on single component nonchemically amplified resist system

Kim, Kyoung-Seon; Kim, Sumin; Park, Jiyoung; Kim, Jin-Baek, Advances in Resist Technology and Processing XXIII, SPIE, 2006-02-20

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