급속 열처리시 실리콘 웨이퍼의 온도 분포와 슬립 현상의 해석Analysis of Temperature Distribution and slip in Rapid Thermal Processing
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이혁 | ko |
| dc.contributor.author | 유영돈 | ko |
| dc.contributor.author | 엄윤용 | ko |
| dc.contributor.author | 신현동 | ko |
| dc.contributor.author | 김충기 | ko |
| dc.date.accessioned | 2013-02-25T11:16:26Z | - |
| dc.date.available | 2013-02-25T11:16:26Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1992-04 | - |
| dc.identifier.citation | 대한기계학회논문집 A, v.16, no.4, pp.609 - 620 | - |
| dc.identifier.issn | 1226-4873 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/61760 | - |
| dc.language | Korean | - |
| dc.publisher | 대한기계학회 | - |
| dc.title | 급속 열처리시 실리콘 웨이퍼의 온도 분포와 슬립 현상의 해석 | - |
| dc.title.alternative | Analysis of Temperature Distribution and slip in Rapid Thermal Processing | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 16 | - |
| dc.citation.issue | 4 | - |
| dc.citation.beginningpage | 609 | - |
| dc.citation.endingpage | 620 | - |
| dc.citation.publicationname | 대한기계학회논문집 A | - |
| dc.contributor.nonIdAuthor | 이혁 | - |
| dc.contributor.nonIdAuthor | 유영돈 | - |
| dc.contributor.nonIdAuthor | 엄윤용 | - |
| dc.contributor.nonIdAuthor | 신현동 | - |
- Appears in Collection
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.