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MEASUREMENT OF PARTICLE DEPOSITION VELOCITY TOWARD A HORIZONTAL SEMICONDUCTOR WAFER BY USING A WAFER SURFACE SCANNER BAE, GN; LEE, CS; Park, Seung O, AEROSOL SCIENCE AND TECHNOLOGY, v.21, no.1, pp.72 - 82, 1994-07 |
MEASUREMENTS AND CONTROL OF PARTICLE DEPOSITION VELOCITY ON A HORIZONTAL WAFER WITH THERMOPHORETIC EFFECT BAE, GN; LEE, CS; Park, Seung O, AEROSOL SCIENCE AND TECHNOLOGY, v.23, no.3, pp.321 - 330, 1995-10 |
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