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Efforts in developing design and simulation tools for MEMS: DS/MEMS and CA/MEMS

Youn, Sung-Kie; Kwak, Byung Man; Kwon, Jang-Hyuk; Chang, Su-Young; Huh, Jae S.; Kim, Eugene, Symposium on Design/Test/Integration and Packaging of MEMS/MOEMS, 2002, v.4755, pp.275 - 284, 2002-01

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