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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Parametric study on synthesis of crystalline silicon nanoparticles in capacitively-coupled silane plasmas Chai, Kil-Byoung; Seon, Chang-Rae; Moon, Se-Youn; Choe, Won-Ho, THIN SOLID FILMS, v.518, pp.6614 - 6618, 2010-09 |