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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Density measurement of particles in rf silane plasmas by the multipass laser extinction method Seon, C. R.; Choe, Wonho; Park, H. Y.; Kim, Junghee; Park, S.; Seong, D. J.; Shin, Y. H., APPLIED PHYSICS LETTERS, v.91, no.25, 2007-12 |
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