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Correlation between excitation temperature and electron temperature with two groups of electron energy distributions Park, Hoyong; You, S. J.; Choe, Wonho, PHYSICS OF PLASMAS, v.17, 2010-10 |
Effect of deposition pressure on bonding nature in hydrogenated amorphous carbon films processed by electron cyclotron resonance plasma enhanced chemical vapor deposition Ryu, Ho Jin; Kim, SH; Hong, Soon-Hyung, MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, v.277, no.1-2, pp.57 - 63, 2000-01 |
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