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Preliminary Result of Tomographic Diagnostics for Plasma Spatial Uniformity of 8G Plasma Etching Device

Choe, Wonho; Park, Sanghoo; Jang, Juhyeok; Hong, Sung Jae; Koo, Byung Hee, 10th Asian-European International Conference on Plasma Surface Engineering (AEPSE), Asian Joint Committee for Applied Plasma Science and Engineering, 2015-09-22

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