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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Effects of gas ring position and mesh introduction on film quality and thickness uniformity Hong, Daniel Seungbum; Kim, E; Jiang, ZT; Bae, Byeong-Soo; No, Kwangsoo; Lim, SC; Woo, S; Koh, Y, MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.45, no.1-3, pp.98 - 101, 1997-03 | |
| Titanium oxide film for the bottom antireflective layer in deep ultraviolet lithography Jun, BH; Han, SS; Kim, KS; Lee, JS; Jiang, ZT; Bae, Byeong-Soo; No, Kwangsoo; Kim, DW; Kang, HY; Koh, YB, APPLIED OPTICS, v.36, no.7, pp.1482 - 1486, 1997-03 |