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Eliminating the Trade-Off between the Throughput and Pattern Quality of Sub-15 nm Directed Self-Assembly via Warm Solvent Annealing

Kim, Jong Min; Kim, YongJoo; Park, Woon Ik; Hur, Yoon Hyung; Jeong, Jae Won; Sim, Dong Min; Baek, Kwang Min; et al, ADVANCED FUNCTIONAL MATERIALS, v.25, no.2, pp.306 - 315, 2015-01

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