Browse "MS-Journal Papers(저널논문)" by Subject uniformity
Showing results 1 to 1 of 1
| Effects of gas ring position and mesh introduction on film quality and thickness uniformity Hong, Daniel Seungbum; Kim, E; Jiang, ZT; Bae, Byeong-Soo; No, Kwangsoo; Lim, SC; Woo, S; et al, MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, v.45, no.1-3, pp.98 - 101, 1997-03 |
Discover
Open Access
- 265 OA Article
Date issued
- 1,055 2020 - 2024
- 2,625 2010 - 2019
- 2,168 2000 - 2009
- 1,240 1990 - 1999
- 179 1980 - 1989