Browse "MS-Journal Papers(저널논문)" by Subject barrierless

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Electromigration Reliability of Barrierless Ruthenium and Molybdenum for Sub-10 nm Interconnection

Kim, Jungkyun; Rhee, Hakseung; Son, Myeong Won; Park, Juseong; Kim, Gwangmin; Song, Hanchan; Kim, Geunwoo; et al, ACS APPLIED ELECTRONIC MATERIALS, v.5, no.5, pp.2447 - 2453, 2023-04

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