Browse "MS-Journal Papers(저널논문)" by Subject SRTIO3 THIN-FILMS
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| Mass spectroscopic study for vaporization characteristics of Ba(TMHD)(2) and Sr(TMHD)(2) in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition Lee, JS; Song, HW; Kim, KS; Yu, BG; Jeong, YH; Jiang, ZT; No, Kwangsoo, JOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.15, no.1, pp.72 - 76, 1997 |
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