Browse "MS-Journal Papers(저널논문)" by Subject PZT thick films
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| Residual stress analysis of Pt bottom electrodes on ZrO2/SiO2/Si and SiO2/Si substrates for Pb(ZrTi)O-3 thick films Jeon, Y; Kim, DG; No, Kwangsoo; Kim, SJ; Chung, J, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.39, no.5A, pp.2705 - 2709, 2000-05 |
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