Browse "MS-Journal Papers(저널논문)" by Subject PSM

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Chromium aluminum oxide films for ArF line high transmittance attenuated phase shifting mask application

Kim, E; Moon, SY; Kim, YH; Yoon, HS; No, Kwangsoo, OPTICAL ENGINEERING, v.39, no.11, pp.2947 - 2955, 2000-11

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